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MEMS Study guide for 3/10/2016

by: Manoj K

MEMS Study guide for 3/10/2016 ECE 449

Marketplace > ECE 449 > MEMS Study guide for 3 10 2016
Manoj K


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Has a guide for Mid term
Microdevices and Micromachining Technology
Prof. Igor Paprotny
Study Guide
50 ?




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This 1 page Study Guide was uploaded by Manoj K on Tuesday March 8, 2016. The Study Guide belongs to ECE 449 at a university taught by Prof. Igor Paprotny in Spring 2016. Since its upload, it has received 21 views.


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Date Created: 03/08/16
ME/ECE 449 Study Guide  What is MEMS – Micro Electro Mechanical Systems  Material used – silicon, metallic glass  Fabrication processes – Bulk Micromachining and Surface Micromachining  Surface Micromachining – Etch surface layers to get desired structure  Bulk Micromachining – Etch away the handle wafer to get desired structure  Material deposition techniques – PVD, CVD  Oxide layer growth techniques – Wet oxide, Dry Oxide  Etchants and photoresists  Types of etching – isotropic and anisotropic  Etch stop – boron etch stop, timed etch stop, electrochemical etch stop  Use of Au/Cr layer  Scaling laws  Beams  Moment of Inertia of beams=bd^3/12  Deflection of cantilever = 3EI/L^3  Deflection of a guided beam = 12EI/L^3


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