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by: Brandon Douglas


Brandon Douglas
GPA 3.75


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Class Notes
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This 7 page Class Notes was uploaded by Brandon Douglas on Friday September 18, 2015. The Class Notes belongs to EEL 5225 at University of Florida taught by Staff in Fall. Since its upload, it has received 25 views. For similar materials see /class/206839/eel-5225-university-of-florida in Electrical Engineering at University of Florida.

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Date Created: 09/18/15
Structures I Agenda 7 Thermal expansion 7 Beams Axially Loaded Bending I Reading Senturia Ch 8 p 193197 Ch 9 pp 200206 I Linear thermal expansion coefficient dgx 1 a7 dT Kelvms39 T temperature 1076 10397 1T can be treated as a constant in a moderate temperature range ie SAT 8430 07 AT I Volume thermal expansion coefficient AV V1gx1gyX1gz 13a7AT UNIVERSIT X or i FLORID Deposited at temperature Td Zero s ress Cooled to room temperature T Substrate and thin lm both shrunk Stress induced Thermal strain of substrate 85 TS AT Thermal strain of thin lm Efvanmhzd 85 Thermal strain of thin lm ifnot attached to substrate gffr22 ajf AT Thermal mismatch strain gfmsmazch an 0 7 AT Inplane biaxial stress mm mm vr 7 Q FLORID 39 Residual stress 0 Thermal mismatch stress 0 Intrinsic stress Deposition process gt Thermal treatment or annealing 1m x 1 Mechanical pmpcny am for sawed mruneimmnic materials Sumus is 54 ss 56 Mnurinl m E v 111 1 Emmi kym GPA Immian MPa mm 2331 3 i9 2 3 Cubic m2 2w pay 573 7A 13 a Hexagonal gum rum me 72 16 Arumplums Paiymamn 2331 150 01 2 2 Virus Random gram sum dioxide 2200 m n a 7 400 mm Silicon mind mu m 27 2 3 1 l 00 Simulrinmcuir won 270 27 23 50 qu SILICDE rich Aluminum 2597 70 22x varies Polycrysullmc Ref Sentuna p 196 Structures Beams l Microsystems are comprised of many different types of structural elements I Stiffness Resonancefrequency Ref Young et a1 mm 39 new 7 r m Tethers for parallel plate capacitors Tethers for accelerometers Ref ADI F i i i i i ill lt2 m Ami ioading Twisting gnaw Pnn rllvs m MEWS nmsuucus Fall 2mm MW H z Ref Sentunap 202 F F 3 H l x L F The uniform axial stress is 7 Ifthebeam is comprised ofa linearly WH g F elastic material then the strain is F Hooke39s Law The corresponding E EWH FL change In the length ofthe beam is 5L L The spring constant for EWH this axially loaded beam can be determined by F ktSL so


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