?A size D compressed gas cylinder has an internal volume of 2.40 liters. Estimate the

Chapter 3, Problem 3.62

(choose chapter or problem)

A size D compressed gas cylinder has an internal volume of 2.40 liters. Estimate the pressure in a size D cylinder if it contains 454 g of one of the following semiconductor process gases at 20°C:

(a) Phosphine, \(PH_{3}\), for which \(T_{c}\) = 324.8 K, \(P_{c}\) = 65.4 bar, and ω = 0.045

(b) Boron trifluoride, \(BF_{3}\), for which \(T_{c}\) = 260.9 K, \(P_{c}\) = 49.9 bar, and ω = 0.434

(c) Silane, SiH4, for which \(T_{c}\) = 269.7 K, \(P_{c}\) = 48.4 bar, and ω = 0.094

(d) Germane, GeH4, for which \(T_{c}\) = 312.2 K, \(P_{c}\) = 49.5 bar, and ω = 0.151

(e) Arsine, AsH3, for which \(T_{c}\) = 373 K, \(P_{c}\) = 65.5 bar, and ω = 0.011

(f) Nitrogen trifluoride, \(NF_{3}\), for which \(T_{c}\) = 234 K, \(P_{c}\) = 44.6 bar, and ω = 0.120

Text Transcription:

PH_3

T_c

P_c

BF_3

NF_3