In their book Empirical Model Building and Response

Chapter 14, Problem 68E

(choose chapter or problem)

In their book Empirical Model Building and Response Surfaces (John Wiley, 1987), Box and Draper described an experiment with three factors. The data in the following table are a variation of the original experiment from their book. Suppose that these data were collected in a semiconductor manufacturing process.

(a) The response \(\mathrm{y}_{1}\) is the average of three readings on resistivity for a single wafer. Fit a quadratic model to this response.

(b) The response \(\mathrm{y}_{2}\) is the standard deviation of the three resistivity measurements. Fit a linear model to this response.

(c) Where would you recommend that we set \(x_{1}, x_{2}, \text { and } x_{3}\)  if the objective is to hold mean resistivity at 500 and minimize the standard deviation?

Equation Transcription:

 

   

Text Transcription:

y1

y2  

x1, x2, and x3

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