n the thermal processing of semiconductor | StudySoup

Textbook Solutions for Fundamentals of Heat and Mass Transfer

Chapter 1 Problem 1.56

Question

n the thermal processing of semiconductor materials,annealing is accomplished by heating a silicon waferaccording to a temperature-time recipe and then main-taining a fixed elevated temperature for a prescribedperiod of time. For the process tool arrangement shownas follows, the wafer is in an evacuated chamber whose walls are maintained at 27C and within whichheating lamps maintain a radiant flux at its upper surface. The wafer is 0.78 mm thick, has a thermal con-ductivity of 30 W/m?K, and an emissivity that equalsits absorptivity to the radiant flux (???l?0.65). For?3.0?105W/m2, the temperature on its lower sur-face is measured by a radiation thermometer and foundto have a value of Tw,l?997C. To avoid warping the wafer and inducing slip planes inthe crystal structure, the temperature difference acrossthe thickness of the wafer must be less than 2C. Is thiscondition being met?

Solution

Step 1 of 4)

The first step in solving 1 problem number 56 trying to solve the problem we have to refer to the textbook question: n the thermal processing of semiconductor materials,annealing is accomplished by heating a silicon waferaccording to a temperature-time recipe and then main-taining a fixed elevated temperature for a prescribedperiod of time. For the process tool arrangement shownas follows, the wafer is in an evacuated chamber whose walls are maintained at 27C and within whichheating lamps maintain a radiant flux at its upper surface. The wafer is 0.78 mm thick, has a thermal con-ductivity of 30 W/m?K, and an emissivity that equalsits absorptivity to the radiant flux (???l?0.65). For?3.0?105W/m2, the temperature on its lower sur-face is measured by a radiation thermometer and foundto have a value of Tw,l?997C. To avoid warping the wafer and inducing slip planes inthe crystal structure, the temperature difference acrossthe thickness of the wafer must be less than 2C. Is thiscondition being met?
From the textbook chapter Introduction you will find a few key concepts needed to solve this.

Step 2 of 7)

Visible to paid subscribers only

Step 3 of 7)

Visible to paid subscribers only

Subscribe to view the
full solution

Title Fundamentals of Heat and Mass Transfer 7 
Author Theodore L. Bergman; Adrienne S. Lavine; Frank P. Incropera; David P. DeWitt
ISBN 9780470501979

n the thermal processing of semiconductor

Chapter 1 textbook questions

×

Login

Organize all study tools for free

Or continue with
×

Register

Sign up for access to all content on our site!

Or continue with

Or login if you already have an account

×

Reset password

If you have an active account we’ll send you an e-mail for password recovery

Or login if you have your password back